Design of Mems Based Tristate Phase Shifter Using COMSOL 4.3b
نویسندگان
چکیده
A V-band CMOS-MEMS switchable phase shifter based on reflection-type topology is presented in this work. Phase shifter is simulated by using CMOS process. Three discrete phase states are achieved at 65GHz by using Bi-directional fishbone actuators. The measured insertion is very less and the return loss is also better than 14 dB over the 55-65GHz frequency range. It demonstrates a great potential in many applications.
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